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Stripping process training: Plasma ashing, wet cleaning and wet stripping

Reference: 85B
OBJECTIVES
Il s’agit pour les futurs stagiaires :
- d’acquérir une meilleure connaissance des notions de base associées aux procédés de stripping et aux résultats attendus,
- d’identifier les différents paramètres de fonctionnement des procédés et leur influence sur le produit, sur les traitements ultérieurs.
AUDIENCE

Techniciens, ingénieurs et chercheurs impliqués dans des problématiques de gravure et/ou de stripping.


PREREQUISITES
Pas de pré requis spécifique.
CONTENT
1) Introduction
a. Définitions and applications
b. Compatibility and efficiency
c. Lithography aspects and impact for stripping
d. Contamination aspects in stripping
2) Photoresist plasma ashing
a. Generalities on plasma
b. Efficiency in plasma ashing: striprate and overstrip
c. Process parameter influence on striprate
d. Compatibility in plasma ashing
3) FEOL wet cleaning/BEOL wet cleaning/Photoresist wet stripping :
a. Wet processes: general considerations
b. Kinetically vs mass transfer limited reactions
4) FEOL wet cleaning
a. General considerations
b. Caro’s acid
c. RCA clean: SC1/SC2
d. Hydrofluoric acid
e. Ozone-based cleaning
f. Compatibility in FEOL wet cleaning
5) BEOL wet Cleaning
a. General considerations
b. Aluminum BEOL cleaning
c. Copper Damascene BEOL cleaning
d. Compatibility in BEOL wet cleaning
6) Photoresist wet stripping
a. General considerations
b. Wet stripping with inorganic chemicals
c. Wet stripping with organic solvents
TEACHING METHOD
La formation privilégie l’interactivité entre les participants et le formateur : utilisation fréquente des « boitiers voteurs » pour conclure les différents chapitres clés et refocaliser sur les messages clés.

Session 2019

No training session is currently scheduled for 2019. Contact us.

Ref. 85B - Stripping process training: Plasma ashing, wet cleaning and wet stripping

Attached documents in pdf/docx/xlsx formats - max. 5Mo
 
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Session 2020

No training session is currently scheduled for 2020. Contact us.

Ref. 85B - Stripping process training: Plasma ashing, wet cleaning and wet stripping

Attached documents in pdf/docx/xlsx formats - max. 5Mo
 
Fields marked with an * are mandatory